What’s the background of MEMS gyroscope? | MU Message Board Posts

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Msg  13552 of 13553  at  10/27/2023 5:00:53 AM  by


What’s the background of MEMS gyroscope?

MEMS gyroscope technology was first conceived by Richard Pfeynman (who won the Nobel Prize in Physics in 1965) in 1959. In 1962, the silicon micro pressure sensor came out.
Roylance and Angell began developing piezoresistive microaccelerometers in 1979. In 1991, Cole began the development of capacitive microaccelerometers.
Both accelerometers and gyroscopes are called inertial sensors. MEMS gyroscope can exist in IMU (Inertial Measurement Unit), INS (Inertial Navigation System) and AHRS (Attitude Heading Reference System). The IMU is mainly composed of 3 MEMS accelerometers, 3 MEMS gyros. AHRS is an IMU with 3 magnetic sensors. Through calculation based on the quaternion method, the pitch angle, roll angle and heading angle of the moving body can be directly output.
This MEMS gyroscope (https://www.ericcointernational.com/gyroscope/mems-gyroscope/er-mg2-100-north-seeking-mems-gyro.html) has 0.01-0.02°/hr bias instability and 0.0025-0.005°/√hr angular random walk. The size is only 11 x 11 x 2mm. It can the following application areas:
▪ North seeking in logging tools/gyro tools;
▪ Pointing, steering and guiding in advanced mining/drilling equipment;
▪ Precision platform attitude measuring and controls;
▪ Precision attitude, position measuring in navigation grade MEMS IMU/INS;
▪ North finding and positioning in land surveying/land mobile mapping system
In 1998, the earliest MEMS gyroscope was designed and developed by CSDL from United States. In the same year, Drapor Labs developed another form of MEMS gyroscope. Its basic principle is to use the Coriolis effect generated when the base drives the vibrating mass body to sense angular velocity.
As a consumer level product, high-precision MEMS gyroscope is mainly used in portable devices such as mobile phones, game consoles, music players, wireless mice, digital cameras, smart toys, and GPS navigation, etc.
As an industrial level and automotive product, it is mainly used in automotive electronic stability systems (ESP or ESC), GPS-assisted navigation systems, automotive airbags, vehicle attitude measurement, industrial automation, large medical equipment, robots, etc. MEMS gyros in these fields are medium precision. At the same time, MEMS gyroscope can also be used in gyro tools and logging tools in oil gas and drilling to help north seeking and positioning. High-precision MEMS gyros are used in the military and aerospace fields, and can also be used for stability applications such as communication satellite wireless, missile seekers, and optical sighting systems; aircraft/missile flight control, attitude control, yaw damping and other control applications.
👉 Read the reference: https://www.ericcointernational.com/info/background-and-development-status-of-mems-inertial-sensors.html

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